匀胶机抽口是用于真空吸附与排废的核心接口,主要负责将基片(晶圆 / 玻片)牢牢固定在片托上,并在高速匀胶时及时抽走溢出的光刻胶 / 溶剂,确保膜厚均匀与设备安全。
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